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Untersuchung Und Optimierung Der Akustischen Eigenschaften Kapazitiver Mikromechanischer Ultraschallwandler Am Beispiel Der Medizinischen Diagnostik

Untersuchung Und Optimierung Der Akustischen Eigenschaften Kapazitiver Mikromechanischer Ultraschallwandler Am Beispiel Der Medizinischen Diagnostik

          
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About the Book

Kapazitive Ultraschallwandler, deren Herstellung mit Hilfe mikromechanischer Prozesse erfolgt ( Capacitive Micromachined Ultrasound Transducers - CMUTs), stellen einen neuen vielversprechenden Ansatz fur verschiedene Anwendungsfelder dar. In der medizinischen Ultraschalldiagnostik versprechen Ultraschallwandler dieser Art eine bessere Bildqualitat sowie eine einfachere Realisierung von 2D-Ultraschallarrays, mit denen eine schnelle 3D-Ultraschallbildgebung moglich ist. Am Beispiel von ersten CMUT-Arrays fur dieses Anwendungsgebiet wurden im Rahmen dieser Arbeit die akustischen Eigenschaften dieser Ultraschallwandler untersucht und Wege aufgezeigt, mit denen sich das Wandlerprinzip optimal ausnutzen lasst. Im Vordergrund standen dabei Finite Element Method (FEM) Simulationen dieser Wandler mit dem Programm ANSYS r und Berechnungen mit Hilfe von Ersatzschaltbildern (ESBs). Anhand einer Reihe von Messungen an Testmustern, die ausschliesslich mit Oberflachenmikromechanischen Prozessen am Institut fur Mikrosensoren, -aktuatoren und -systeme (IMSAS), der Universitat Bremen hergestellt wurden, erfolgte der Vergleich mit den gewonnenen analytischen und numerischen Ergebnissen. Das im Rahmen dieser Arbeit entwickelte neuartige ESB fur CMUTs (1D-Modell) zahlt zu den wichtigsten Ergebnissen dieser Arbeit. Dieses Modell beruht auf einer eindimensionalen Beschreibung eines CMUT-Arrays mit Hilfe der Kolbenstrahler- und Plattenkondensator-Theorie und berucksichtigt -- im Gegensatz zu bisherigen ESBs -- das nichtlineare Verhalten dieser Wandler. Eine weitere wesentliche Verbesserung der ESB von CMUTs stellt die neue Beschreibung fur den Einfluss des Fluids auf die Membranen eines parallel angesteuerten Arrays dar, die den imaginaren Teil der mechanischen Impedanz des Fluids berucksichtigt. Zusatzliche neue Ergebnisse dieser Arbeit resultieren aus den Untersuchungen der Kopplungen zwischen aktiven und passiven Wandlerzellen im Fluid. Diese wurden mit Hilfe eines einfachen Ansatzes, bei dem ein Fluidhalbraum mit einer endlich steifen Grenzflache verwendet wurde, beschrieben und analysiert. Speziell das optimale Ausnutzen des Sendeverhaltens von CMUTs war Gegenstand dieser Arbeit. Ausfuhrlich wird dabei auf Themen, wie z. B. die Bandbreite des Wandlers, der maximale Sendeschalldruck, die nichtlinearen Verzerrungen im Sendesignal aufgrund der nichtlinearen elektrostatischen Anregung und auf die Moglichkeit zur Vermeidung der unerwunschten nichtlinearen Verzerrungen, eingegangen. Die Untersuchungen zu diesen Themen bestatigen, dass CMUTs die erforderlichen Leistungsspezifikationen fur das Anwendungsgebiet der medizinischen Ultraschalldiagnostik erfullen konnen.


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Product Details
  • ISBN-13: 9783832510640
  • Publisher: Logos Verlag Berlin
  • Binding: Paperback
  • Language: German
  • Returnable: N
  • Weight: 700 gr
  • ISBN-10: 3832510648
  • Publisher Date: 30 Nov 2005
  • Height: 210 mm
  • No of Pages: 181
  • Spine Width: 0 mm
  • Width: 145 mm


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Untersuchung Und Optimierung Der Akustischen Eigenschaften Kapazitiver Mikromechanischer Ultraschallwandler Am Beispiel Der Medizinischen Diagnostik
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