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Optimierung der Plasmaparameter zur Abscheidung von kubischem Bornitrid in Hohlkatodenbogen

Optimierung der Plasmaparameter zur Abscheidung von kubischem Bornitrid in Hohlkatodenbogen

          
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About the Book

Inhaltsangabe: Einleitung: Die immer größer werdenden industriellen Anforderungen an die verwendeten Werkstoffe, sowie die Tendenz immer billiger zu produzieren, verlangen nach neuen Herstellungs- und Veredelungsmethoden einerseits, andererseits aber nach immer sparsamerem Einsatz der teuren Ausgangsprodukte. Diese zwei Gesichtspunkte lenkten die Entwicklung in Richtung neuartiger, innovativer Materialien und deren Herstellungsmethoden. Die beiden wichtigsten Vertreter der neuen Materialien sind der Diamant und das kubische Bornitrid, die bisher härtesten bekannten Stoffe. Wurde lange Zeit besonderes Augenmerk auf die Erforschung des Diamants gelegt, so ist seit dem letzten Jahrzehnt eine rasante Entwicklung bei der Untersuchung des kubischen Bornitrids zu beobachten. Es zeigte sich, daß es dem Diamant in vielen Eigenschaften wie außergewöhnlich hoher Härte, hoher optischer Transparenz sowie chemischer Beständigkeit ebenbürtig ist. In anderen Eigenschaften jedoch, zum Beispiel der höheren Beständigkeit gegen Sauerstoff unter Temperatureinwirkung und dem geringeren Verschleiß bei der Bearbeitung von Metallegierungen im Vergleich zum Karbidbildner Diamant ist kubisches Bornitrid ihm weit überlegen. Der wohl wichtigste Vorteil des kubischen Bornitrids ist die Möglichkeit, den Kristall sowohl p- als auch n- zu dotieren. Beim Diamant ist es bis heute nicht gelungen, eine n-Dotierung zu erreichen. Die Bandstruktur des kubischen Bornitrids ermöglicht direkte Übergänge und läßt so an die Entwicklung photoaktiver Halbleiterbauelemente für den UV-Bereich denken. Der große Bandabstand erlaubt den Einsatz von kubischen Bornitridschichten als Isolatormaterial. Die Beschichtung von Oberflächen, sei es als Verschleißschutz (Bohrer, Fräser) oder lediglich als Schutz vor schädlicher Fremdeinwirkung (Gläser, optische Bauteile, Bauteile in chemisch ätzenden Umgebungen) ist vor allem in Hinblick auf den vergleichsweise geringen Materialeinsatz (die Schichten müssen lediglich weni


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Product Details
  • ISBN-13: 9783838617374
  • Publisher: Diplom.de
  • Binding: Paperback
  • Language: German
  • Returnable: N
  • Spine Width: 9 mm
  • Width: 148 mm
  • ISBN-10: 3838617371
  • Publisher Date: 02 Sep 1999
  • Height: 210 mm
  • No of Pages: 148
  • Series Title: German
  • Weight: 204 gr


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