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Optimierung und Anwendung der Schwingquarzmesstechnik zur Untersuchung und Kontrolle der Atomlagenabscheidung

Optimierung und Anwendung der Schwingquarzmesstechnik zur Untersuchung und Kontrolle der Atomlagenabscheidung

          
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About the Book

Die Schwingquarzmesstechnik ermöglicht die Überwachung, Untersuchung und Kontrolle des Schichtwachstums während der Herstellung dünnster Schichten aus der Gasphase. Zur Optimierung und Anwendung der Schwingquarzmesstechnik für die Atomlagenabscheidung (atomic layer deposition - ALD) wurden die Grundlagen der Schichtdickenmessung mit Schwingquarzen analysiert und hinsichtlich der Besonderheiten bei der Verwendung in einem ALD-Prozess diskutiert. Die verschiedenen Einflüsse auf die Resonanzfrequenz eines Schwingquarzes wurden ebenso wie die Möglichkeiten zur Optimierung der Messtechnik dargestellt. Der Einfluss von Temperaturschwankungen stellte sich dabei als besonders kritisch heraus, weshalb Schwingquarzmessköpfe und Methoden zur Kompensation von temperaturbedingten Störungen entwickelt wurden. Mit Hilfe der so optimierten Schwingquarzmesstechnik konnte ein ALD-Prozess für Hafniumoxidschichten vollständig schwingquarzbasiert entwickelt werden, wobei mit geringem Zeitaufwand hunderte Parametersätze charakterisiert und Wechselwirkungen zwischen verschiedenen Prozessparametern detailliert untersucht werden konnten. Bei der Untersuchung des heterogenen Schichtwachstums während der Herstellung von Mischschichten und Laminaten ermöglichten Schwingquarzmessungen eine Beobachtung und Kontrolle des initialen Wachstums von Aluminiumoxid und Titanoxid auf dem jeweils anderen Material. Die Beschichtung poröser Materialien durch einen ALD-Prozess wurde mit Hilfe von Schwingquarzen mit aufgebrachten porösen Schichten überwacht und der Einfluss von Prozessparametern und der Porengeometrie auf das Eindringen der Prozessgase untersucht, wodurch grundlegende Erkenntnisse zum Gastransport in porösen Medien gewonnen werden konnten.


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Product Details
  • ISBN-13: 9783746919799
  • Publisher: Bod Third Party Titles
  • Publisher Imprint: Tredition Gmbh
  • Height: 229 mm
  • No of Pages: 180
  • Spine Width: 11 mm
  • Width: 152 mm
  • ISBN-10: 3746919797
  • Publisher Date: 14 Mar 2018
  • Binding: Hardback
  • Language: German
  • Returnable: N
  • Weight: 412 gr


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Optimierung und Anwendung der Schwingquarzmesstechnik zur Untersuchung und Kontrolle der Atomlagenabscheidung
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