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Nanolithography and Patterning Techniques in Microelectronics

Nanolithography and Patterning Techniques in Microelectronics

          
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About the Book

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications.

A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices.

With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices.
About the Author: Dr. David Bucknall is Professor of Materials Science and Engineering at Georgia Institute of Technology, US. His research interests are in areas associated with polymer interfaces and morphology, functionalized polymers and nanocomposites. His research exploits neutron and x-ray scattering as primary advanced characterization tools. His current research includes using polymers to create fundamental building blocks for possible quantum computer architectures, hydrogels for maxillofacial reconstructive surgery, and effect of morphology and processing in organic photovoltaics.


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Product Details
  • ISBN-13: 9781855739314
  • Publisher: Woodhead Publishing
  • Publisher Imprint: Woodhead Publishing
  • Edition: illustrated ed
  • Language: English
  • Returnable: Y
  • Spine Width: 37 mm
  • Width: 162 mm
  • ISBN-10: 1855739313
  • Publisher Date: 30 Sep 2005
  • Binding: Hardback
  • Height: 240 mm
  • No of Pages: 424
  • Series Title: Woodhead Publishing Electronic and Optical Materials
  • Weight: 757 gr


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