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Mikromechanik: Einführung in Technologie Und Anwendungen

Mikromechanik: Einführung in Technologie Und Anwendungen

          
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About the Book

Die Mikromechanik, die sich mit Entwurf, Herstellung und Anwendung von dreidimen- sionalen mechanischen Strukturen und Systemen mit Abmessungen im Mikrometerbe- reich befaßt, hat in den vergangenen Jahren zunehmend an Bedeutung gewonnen und steht an der Schwelle zur breiten industriellen Anwendung. Ihr Einsatz führt zu Quali- täts-und Leistungssteigerungen in vielen Bereichen der modernen Technik. An Stelle der konventionellen Fertigungsverfahren der Feinwerktechnik nutzt die Mikro- mechanik den Technologievorrat der Mikroelektronik, vor allem das Konzept der hoch- gen auen Strukturübertragung mittels lithographischer Verfahren und das Konzept der kostengünstigen Fertigung in Batch-Prozessen. Die Mikromechanik kann daher als konsequente Weiterentwicklung der Mikroelektronik auf nicht-elektronische Gebiete be- trachtet werden. Die gemeinsame technologische Basis von Mikromechanik und Mikro- elektronik bietet günstige Voraussetzungen für die Integration mechanischer, optischer und elektronischer Funktionen zu komplexen Mikrosystemen. Die zur Zeit rasch anstei- gende Zahl von Publikationen zu diesem Thema zeigt die große Bedeutung, die dieser Entwicklung von Wissenschaft und Industrie beigemessen wird. Mikromechanische Bauelemente können durchaus in mittelständischen Betrieben ent- wickelt und gefertigt werden. Wichtig ist jedoch, daß diese Betriebe Ingenieure als Mitarbeiter finden, die einen breiten Überblick über die Möglichkeiten der Mikromecha- nik besitzen. Das vorliegende Buch möchte deshalb Studierenden, Anwendern in For- schung und Entwicklung sowie technisch interessierten Lesern eine Einführung in die technologischen Grundlagen und die Anwendungen der Mikromechanik geben. Es ist aus einer Vorlesung entstanden, die ich seit 1986 an der Universität Stuttgart für Stu- denten der Fakultät Konstruktions-und Fertigungstechnik halte.


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Product Details
  • ISBN-13: 9783519030713
  • Publisher: Vieweg+teubner Verlag
  • Publisher Imprint: Vieweg+teubner Verlag
  • Height: 216 mm
  • No of Pages: 240
  • Series Title: Angewandte Physik
  • Sub Title: Einführung in Technologie Und Anwendungen
  • Width: 140 mm
  • ISBN-10: 3519030713
  • Publisher Date: 01 Nov 1990
  • Binding: Paperback
  • Language: German
  • Returnable: Y
  • Spine Width: 13 mm
  • Weight: 290 gr


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