In "Design and Fabrication of MEMS Magnetometer," Aditi explores the technology behind micro-electro-mechanical systems (MEMS) and their use in the creation of highly sensitive magnetometers. The book provides a detailed study of the design, fabrication, and performance of MEMS-based magnetometers, which have numerous applications in fields such as aerospace, navigation, and medical imaging.
The book begins with an overview of the basic principles of magnetometry and the various types of magnetometers that are currently available. The author then delves into the design principles and simulation techniques used for creating MEMS-based magnetometers, including the use of finite element analysis (FEA) and analytical models.
The book also covers the experimental techniques used for fabricating MEMS-based magnetometers, including the use of silicon micromachining and surface micromachining. The author explores the various materials and manufacturing processes used in MEMS fabrication, including photolithography, etching, and deposition.
Furthermore, the book provides a detailed discussion of the performance characteristics of MEMS-based magnetometers, including sensitivity, resolution, and linearity. The author also explores the potential applications of MEMS-based magnetometers in areas such as navigation, magnetic resonance imaging (MRI), and geological surveys.
Overall, "Design and Fabrication of MEMS Magnetometer" provides a comprehensive overview of the design, fabrication, and performance of MEMS-based magnetometers and their potential applications. This book will be a valuable resource for researchers, engineers, and students in the fields of MEMS technology, magnetometry, and related fields.
