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Elektrochemische Messungen an durch PVD-Verfahren erzeugten Oxidschichten: Untersuchungen zur Schichtherstellung und zur Meßmethodik

Elektrochemische Messungen an durch PVD-Verfahren erzeugten Oxidschichten: Untersuchungen zur Schichtherstellung und zur Meßmethodik

          
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About the Book

Inhaltsangabe: Problemstellung: An der Darstellung dünner Schichten bestehend aus (dotiertem) Zinn(IV)-Oxid besteht bereits seit drei Jahrzehnten ein großes Interesse, weil transparente, n-halbleitende Oberflächen hergestellt werden können (TCO - transparent conductive oxides). Reines, stöchiometrisches Zinndioxid (SnO2) ist ein Isolator. Ziel der Herstellungsverfahren ist es also, einerseits Schichten mit geringem Sauerstoff-Unterschuß zu erzeugen (SnO2-?), die dann Fehlstellen (z. B. Sauerstoffionenleerstellen) als Elektronendonatoren enthalten. Andererseits kann die gewünschte Leitfähigkeit durch Dotierung mit Fremdatomen wie z. B. Sb oder F erreicht werden. W erden Schichten mit Sauerstoff-Defizit in Gegenwart von O2 (z. B. in Luft) über etwa 600 K erhitzt, werden die o. g. Donatoren durch Oxidation (Einbau von Sauerstoff in die Schicht, z. B. auf Sauerstoffionenleerstellen) vernichtet. Dahingegen sind z. B. Störstellen durch eingebautes Sb(V) bis über 1 100 K stabil. Zur Herstellung dünner TCO-Schichten stehen physikalische wie chemische Verfahren zur Verfügung. In dieser Arbeit wird auf die Physical-Vapor-Deposition eingegangen werden. Die meisten Arbeiten, die sich mit dieser Thematik befassen, behandeln die Optimierung von Betriebsparametern bezüglich der optischen Transparenz und elektrischen Leitfähigkeit. TCOs wurden beispielsweise in der Röhrenindustrie angewandt, werden bei der Dünnschichtsolar-Technologie eingesetzt und zur Herstellung nicht vereisender Windschutzscheiben verwendet. Ein mit Zinndioxid beschichteter Glasträger kann in der analytischen Chemie für elektrochemischen Untersuchungsmethoden wie Potentiometrie, Amperometrie und Coulometrie, bei denen Redoxvorgänge ablaufen, als Indikatorelektrode dienen. Eine solche Elektrode ist sensitiv für Mn04-, Ce4+, Cr2O72-, S2O32-, Ti3+, Tl+ und NO2-. Die Potentiale, die sich bei einer Zinndioxid-Glas-Elektrode in Redoxsystemen wie Fe2+/Fe3+, [Fe(CN)6]4-/[Fe(CN) 6]3-oder Chinhydron/Hydrochinon einst


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Product Details
  • ISBN-13: 9783838613079
  • Publisher: Diplom.de
  • Binding: Paperback
  • Language: German
  • Returnable: N
  • Spine Width: 10 mm
  • Weight: 245 gr
  • ISBN-10: 3838613074
  • Publisher Date: 31 Mar 1999
  • Height: 210 mm
  • No of Pages: 180
  • Series Title: German
  • Sub Title: Untersuchungen zur Schichtherstellung und zur Meßmethodik
  • Width: 148 mm


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Elektrochemische Messungen an durch PVD-Verfahren erzeugten Oxidschichten: Untersuchungen zur Schichtherstellung und zur Meßmethodik
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Elektrochemische Messungen an durch PVD-Verfahren erzeugten Oxidschichten: Untersuchungen zur Schichtherstellung und zur Meßmethodik
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