Suryadevara Babu

Suryadevara BabuSuryadevara Babu is distinguished professor and former director of the Center for Advanced Materials Processing (CAMP) at Clarkson University, NY, USA. His research interests include CMP of metal and dielectric films, CMP for shallow-trench isolation particle-free solutions for CMP, and post-CMP cleaning. Read More Read Less

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PHYSICAL PHARMACEUTICS-I, REVISED EDITION11 %
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Advances in Chemical Mechanical Planarization (Cmp)19 % NR
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