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P. (Wacker Siltronic AG, Burghausen, Germany) Wagner

P. (Wacker Siltronic AG, Burghausen, Germany) Wagner

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Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment
Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment
By: H. (Institute for Semiconductor Physics, Franfurt Richter, P. (Wacker Siltronic AG, Burghausen, Germany) Wagner, G. (SEMITOOL Inc, Kalispell, USA) Ritter, H. (Institute for Semiconductor Physics, Franfurt (Oder), Germany) Richter
Publisher: Elsevier Science & Technology
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₹4,285
Binding:
Hardback
Release:
01 Sep 1999
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