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Nanoparticle Engineering for Chemical-Mechanical Planarization27 %
Nanoparticle Engineering for Chemical-Mechanical Planarization
By: Ungyu Paik, Jea-Gun Park, Jea-Gun (Hanyang University, Seoul, South Korea) Park, Ungyu (Hanyang University, Seoul, South Korea) Paik
Publisher: CRC Press
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₹13,476
₹9,837
Binding:
Hardback
Release:
20 Feb 2009
Language:
English
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