Christian Wolfel

Christian Wolfel

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1.
Design for a Sustainable Circular Economy37 %
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Binding:
Hardback
Release:
03 Jan 2024
Language:
English
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5.
Control-oriented modeling and feedback control of reactive sputtering: presented by the running example of depositing aluminum oxide by means of an rf magnetron ccp set-up
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6.
Multivariable dynamic modeling and plasma-oriented advanced process control of nonlinear reactive sputtering: PhD Thesis
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